EXPERIMENTAL COMPARISON OF DIFFERENTIAL-PHASE METHOD AND METHOD OF DYNAMIC FOCUSING IN DEFINING OF ROUGHNESS PARAMETERS OF SURFACES

Authors

  • K. Kunce National aviation university
  • N. Modler National aviation university
  • O. Stelmakh National aviation university
  • O. Sofronov National aviation university
  • V. Dugan National aviation university

DOI:

https://doi.org/10.18372/2310-5461.9.5038

Keywords:

roughness, surface, microscope, laser, scanning, 3D-view

Abstract

In this work you can find information about differential-phase method and method of autofocusing, which are used on differential-phase laser scanning profilograph-profilometer (DFLSPP) and microscope «MICROSCAN» correspondently. Also is considered experimental comparison of defining of 3D micro- and nano-geometrical surface conditions and standardized roughness parameters of surface with the help of those methods.

References

Лазерний скануючий профілограф-профілометр ДЕДАЛ-ЛСПП / О. У. Стельмах, С. М. Кияшко, Є. М. Смірнов и др. // Міжвузівський збірник «Наукові нотатки». — К., 2005.

Патент 217 9328 С1 РФ, МКИ 7G02 B21/00, G01 B11/30. Способ дифференциально-фазовой профилометрии и/или профилометрии и устройство для его реализации / С. Н. Кияшко (РФ), Е. Н. Смирнов, Л. Н. Ельченко, С. А. Коленов, А. У. Стельмах (Украина) — № 2001116525/28; Заявлено 19.06.01; Опубл. 10.02.02, Бюл. № 4. — С. 15.

Колєнов С. О. Аналіз викривлень хвильового фронту лазерним диференційно-фазовим методом: автореф. дис... канд. фіз.-мат. наук: 01.04.05 / Київський національний ун-т ім. Тараса Шевченка. — К., 2003.

http//:www.nanofocus.com

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Published

2011-02-04

How to Cite

Kunce, K., Modler, N., Stelmakh, O., Sofronov, O., & Dugan, V. (2011). EXPERIMENTAL COMPARISON OF DIFFERENTIAL-PHASE METHOD AND METHOD OF DYNAMIC FOCUSING IN DEFINING OF ROUGHNESS PARAMETERS OF SURFACES. Science-Based Technologies, 9(1-2), 28–31. https://doi.org/10.18372/2310-5461.9.5038

Issue

Vol. 9 No. 1-2 (2011)

Section

Avionics and Engineering

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