M. K. Filyashkin, O. I. Chernyay


In this paper, attention was paid to the analysis of the micromechanical sensor unit of the inertial navigation system as the main component of an unmanned aerial vehicle, as well as to improve the technical characteristics. This type of sensor is characterized by large instrumental errors and low sensitivity. In order to increase the sensitivity of a micromechanical gyroscope, the article proposes using resonant oscillation modes, which “enliven” its inertial mass. And in order to reduce the quadrature error of the gyroscope, which is one of the main obstacles to achieving its accuracy, it was proposed to reduce the level of these interferences not only using the synchronous detector, but also in front of it.  A scheme is proposed that provides compensation for quadrature interference not by the mechanical moment generation contour, but by the output voltage channel. Since such a scheme does not affect the mechanical quadrature oscillations of the inertial mass, this effect can be interpreted as a self-oscillation mode, which increases the sensitivity of the secondary contour of the micromechanical gyroscope.


Microelectromechanical sensors; micromechanical gyroscope; self-oscillation mode; sensor sensitivity; sensitive element; secondary circuit; quadratured error; synchronous detector; feedback


T. A. Belyaeva, “Methods for suppressing quadrature interference in micromechanical gyroscopes,” Navigation and motion control. Materials VIII Conference of Young Scientists. St. Petersburg: CCRI “Elektropribor,” 2007, pp. 97–100.

M. K. Filyashkin, Microelectromechanical systems. Kyiv: NAU. 2019, 275 p.

A. Tirtichniy and A. Skalon, “Analysis of the characteristics of compensating converters micromechanical inertial sensors,” Sensors and systems. no. 2, pp. 21–23, 2009.

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