Non-contact method of surface 3D profiling

Authors

  • V.I. Zakiev NAU Aerospace Institute

DOI:

https://doi.org/10.18372/2306-1472.26.1245

Abstract

 Review of interferometric methods of surface analysis. Automatic method of surface 3D profiling is proposed.

References

Olszak A.G., Schmit J., Heaton M.G. Interferometry: Technology and Applications, Veeco Instruments, Inc. //www.veeco.com/

Hiroshi Komatsu Institute for Materials Research, Tohoku University, Sendai, Japan, Principles and Applications of Two-Beam Interferometry. //www.microscopyu.com/

Нагибина И.М., Москалев В.А., Полушкина Н.А., Рудин В.Л. Прикладная физическая оптика ФГУП. – М.: Высш. шк., 2002. – 565 с.

Downloads

How to Cite

Zakiev, V. (2005). Non-contact method of surface 3D profiling. Proceedings of National Aviation University, 26(4), 109–111. https://doi.org/10.18372/2306-1472.26.1245

Issue

Vol. 26 No. 4 (2005)

Section

MODERN AVIATION AND SPACE TEHNOLOGY

License